Turbomolecular pumps
5-axis turbomolecular pumps, Pfeiffer Vacuum with magnetic levitation and compression stage for pumping speeds up to 3050 l / s for N2
Integrated drive electronics
Installation in any orientation
Water cooled
CE marked and ROHS compliant
Heated model (MT) avail..
Turbomolecular pumps
As a leading manufacturer of turbomolecular pumps, Pfeiffer Vacuum offers a range of hybrid and magnetic bearing products.
Application:
Semiconductor industry
- Lithography
- Chemical Vapor Deposition (CVD)
- Vapor Phase Condensation (PVD)
- Ion bea..