5-axis turbomolecular pumps, Pfeiffer Vacuum with magnetic levitation and compression stage for pumping speeds up to 3050 l / s for N2 Integrated drive electronics Installation in any orientation Water cooledCE marked and ROHS compliant Heated model (MT) available for corrosive environments. The ATH-M turbomolecular pump has been developed for the semiconductor industry based on many years of experience.
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