Turbomolecular pumps
As a leading manufacturer of turbomolecular pumps, Pfeiffer Vacuum offers a range of hybrid and magnetic bearing products.
Application:
Semiconductor industry
- Lithography
- Chemical Vapor Deposition (CVD)
- Vapor Phase Condensation (PVD)
- Ion beam etching
- Ion implantation
- Coverings Glass coatings
- Thin films
- Ophthalmology
- Coating solar cells
- Industrial application Metallurgy
- Electronic arc welding
R&D
- Physical equipment
- Simulation of space conditions
Pumping speed for N2, h/p
Compression ratio N2
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