Diffusion Pump Fluids

Pump Fluids

Typical applications

Vacuum metallurgy

Ophthalmic coatings

Vacuum metallization

Vacuum tube industry

Electron beam welding

Vacuum chemistry, analytics

Isolation vacuum

Attainable ultimate pressure

The end pressures can be attained with correct conditioning of the high vacuum pumping system.They refer to blanked off groups of pumps with an appropriate pumping fluid / baffle combination. The ultimate pressure values shown may be decreased if the gas sources are further reduced.

Mineral oil 66A

Vapor pressure at 20°C: 4 · 10-8 mbar

Good chemical, oxidative and thermal resistance

Preferred pressure range: 10-7 – 10-3 mbar

End pressure

LN2 cooling < 6 · 10-9 mbar

Machine cooling -20 °C < 6 · 10-8 mbar

Water cooling 20 °C < 4 · 10-7 mbar

Air cooling 25 °C < 1 · 10-6 mbar

Silicon oil HSR 704 EU                    

Vapor pressure at 20 °C: 2 · 10-8 mbar                                                 

Very good chemical, oxidative and thermal resistance

Preferred pressure range: 10-7 – 10-3 mbar

End pressure

LN2 cooling < 6 · 10-9 mbar

Machine cooling -20 °C < 3 · 10-8 mbar

Water cooling 20 °C < 6 · 10-8 mbar

Air cooling 25 °C < 5 · 10-7 mbar

Silicon oil HSR705

Vapor pressure at 25 °C: 3 · 10- 9 mbar

Very good chemical, oxidative and thermal resistance

Preferred pressure range: 10-8 – 10-5 mbar 

End pressure

LN2 cooling   to 10-11 mbar

Machine cooling -20 °C < 3 · 10-8 mbar

Water cooling 20 °C < 3 · 10-8 mbar

Air cooling 25 °C < 2 · 10-7 mbar

Pentaphenylether SANTOVAC 5

Vapor pressure at 20 °C: 1 · 10-10 mbar

Excellent chemical, oxidative and thermal resistance

Preferred pressure range: 10-8 – 10-3 mbar 

End pressure

LN2 cooling < 6 · 10-9 mbar

Machine cooling -20 °C < 3 · 10-8 mbar

Water cooling 20 °C < 3 · 10-8 mbar

Air cooling 25 °C < 2 · 10-7 mbar