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vacuum gauge

vacuum gauge
vacuum gauge
vacuum gauge
vacuum gauge
vacuum gauge
vacuum gauge
vacuum gauge

Measurement & AnalysisMeasurement

DigiLine

ActiveLine

CenterLine

ModulLine

Handheld vacuum gauges

and Manometer

Customer-specific measuring instruments


Many vacuum applications operate only in a specific pressure range. Analog and digital total vacuum or pressure measurement instruments are used to measure and control the total pressure in a vacuum system. Pfeiffer Vacuum offers different lines of total pressure gauges. 


The criteria for selecting the sensor depends on differing basic conditions:

Pressure range which is to be detected

Gas composition (inert or corrosive)

Required accuracy and repeatability

Ambient conditions such as ionizing radiation

Series at a glance

DigiLine

DigiLine total pressure vacuum gauge with digital signal outlet


Total pressure vacuum gauge with digital signal outlet, analog output with two switch-points as well as Profibus interfaces are available as options

ActiveLine

Total pressure vacuum gauge with analog signal outlet ActiveLine


Total pressure vacuum gauge with analog signal outlet

CenterLine

CenterLine total pressure vacuum gauge with analog signal outlet compatible to Oerlikon Leybold


Total pressure vacuum gauge with analog signal outlet compatible to active gauges from other manufacturers*

ModulLine

Total pressure measurement in areas with ionizing radiation


DigiLine


Total pressure vacuum gauge with digital signal outlet

Choice of fieldbus interfaces or analog output with two switch points and LCD display available as options


DigiLine gauges are designed for industrial and research applications requiring total pressure measurement that is reliable and easy to install. The series covers the technically relevant vacuum range with measuring principles encompassing piezo, Pirani, capacitive, hot cathode and cold cathode sensors. All gauges have an RS-485 interface which can be used to connect up to 16 measuring points to a controller. The M12 connector assemblies qualify these vacuum gauges for usage in heavy-duty environments. The gauges can be operated in a communication network with accessories from the current HiPace turbopump range.


Options include Profibus DP, DeviceNet, Profinet and EtherCAT interfaces or an additional analog output with two switch points and an LCD display.


Customer benefits

Pressure range 5 · 10-10 to 2,000 hPa

Digital signal transmission for error-free communication with a PC or PLC

Suitable for integration in automated applications with HiPace turbopumps

Optional fieldbus interfaces or analog output with two switch points and LCD display available as options

Transmission of pressure values eliminates the need to deal with characteristics and recalculations

M12 connector assemblies for reliable operation in heavy-duty environments

Applications

Hard disk coating

PVD coating

Solar cell production

Space simulation

Vacuum drying/heat treatment

Electron beam welding

Surface coating

Fusion technology


ActiveLine


Total pressure vacuum gauge with analog signal outlet

The ActiveLine series offers a wide range of vacuum gauges that work on a variety of measuring principles and have a classic analog outlet. The series thus covers the technically relevant vacuum range from ultra-high vacuum to overpressure. The outlet voltage of the transmitter, that is proportional to the pressure, can be displayed as pressure on the three controllers or read into controllers through analog inputs for further processing.


Customer benefits

Covers the entire vacuum range

Suitable for all requirement profiles

Space saving installation due to compact design

Optimum cost-benefit ratio

Universally usable due to integrated electronic drive unit

Easy self-diagnosis

Avoids installation errors through controllers with automatic transmitter recognition

Easy wiring for all transmitters through uniform standard cables

Applications

Research facilities

Analysis equipment

Research and production coating facilities

Leak detection systems

Semiconductor development and production

Photovoltaics

Industrial vacuum process systems

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